Fume Hood and Dicing Room
JILA X110 has two fume hoods and two dicing saws.
Fume Hoods
Both fume hoods are available for general use.
Crystal Saw
Used to cut small samples with a low-speed diamond blade.
Tube Furnace
Used for annealing, oxide growth, and chemical vapor deposition.
- Make: Lindberg/Blue M
- Model: 55035-A
- Max Temperature: 1100°C, single zone
- Tube Inner Diameter: 25 mm
Dicing Saw
Used for dicing substrates/samples
- Make: Disco Corporation
- Model: DAD3221
- Max Wafer Size: 4 inch diameter
- Max Substrate Thickness: 5 mm
Dicing Saw
Used for dicing substrates/samples
- Make: Micro Automation
- Model: M1100
- Max Wafer Size: 4 inch diameter
- Max Substrate Thickness: 5 mm
Wafer Bonder
- Make: Dynatex International
- Model: DXB-525
- Temperature Range: 40C - 160C
- Bonding Chamber Size: 130mm