Instrumentation

metrology lab

Metrology Lab

The metrology lab is located in S124 and has several instruments for sample characterization.

cleanroom

Cleanroom

The cleanroom is located in X131 and has lithography, Reactive Ion Etch, SEM, wire bonding and thin film fabrication equipment.

dicing_saws

Fume Hood and Dicing

X110 has two fume hoods and two dicing saws.