Information and Updates
Click below to reserve an instrument.
For new users please fill out the User Information Form and e-mail the pdf to kecklab@jila.colorado.edu. If you intend to use the cleanroom please read the Cleanroom Safety guide and Chemical Safety guide as well.
Note: There is now a Wire Bonder in Metrology!!
The Keck Lab consists of a Cleanroom, Metrology Room and a Fume Hood/Wafer Dicing room. Updates will be periodically posted here on the main web page.
All Cleanroom users must wear pants and closed toe shoes due to the chemical hazards in the cleanroom.
We receive a lot of questions regarding thin film coatings. The Edwards 306 e-beam evaporator can do gold, silver, platinum, titanium, chromium, copper, cobalt, nickel, aluminum and other metals on request (titanium or chromium are often used as an adhesion layer on silicon wafers and dielectric substrates). Also the Edwards 306 chamber can accept up to 4 coating materials per run. Training is available on request or we can coat your samples for a standard charge of 3 hrs labor per run. We also have two sputter chambers for coating metals and dielectrics (see link below for our current sputtering targets). Please send e-mail to kecklab@jila.colorado.edu for all inquiries.
Note: We can help source a sputtering target if needed or we can do a thermal evaporative coating.
Updates
As a reminder all Cleanroom, Metrology and X110 users must sign in on the computer. If the computer is not working record your usage on the backup paper form or e-mail kecklab@jila.colorado.edu. Users who do not login or report their usage will be charged 4 hrs.
If you reserve an instrument in advance and have to cancel you must cancel by midnight the prior day.
The new rate schedule for the maskless laser writer is 0-5 hrs 100% charge, 5-10 hrs 60% charge and >10 hrs is 30% charge. Please let us know your start and end time and we will calculate the total usage charge.
Here is the latest manual for the Maskless Laser Writer, several sections have been updated so please check. Manual
Here is a video on ellipsometer alignment if you run into problems. The sample stage sometimes gets misaligned and there is a small mirror in the drawer that can help with alignment. Ellipsometer Alignment
If you need a refresher on the SEM here is a video training: SEM Training
For the RIE, you now have to turn on the pump manually using the pump controller (read the directions and follow the pictures).
If there are any equipment issues please stop by the office or e-mail us at kecklab@jila.colorado.edu.