Metrology Lab

Reserve Metrology Lab Equipment

The W. M. Keck Optical Measurements Laboratory is located in JILA S105 and contains a suite of instruments for characterizing optical sources and the optical properties of materials.

dimensional afm

Dimensional AFM

Used for profiling features and determining critical dimensions on substrates as large as 6" in diameter.

  • Make: Digital Instruments
  • Model: Dimension 3100
  • Controller: Nanoscope IIIa
  • Add-on: nPoint XY100Z15 scanner
  • Stage Travel: 4" x 4"
beam profiler

Beam Profiler

Displays the spatial profile of a laser beam and beam propagation information (cart).

  • Make: Spiricon
  • Model: Beam Gage & M2-200s-FW-A
  • Filter Wheel: LBS-160
  • Camera: SP300
data logger

Data Logger

Data acquision device for vibration, acoustic, and electromagnetic measurements.

  • Make: Measurement Computing Corporation
  • Model: WebDAQ 504
  • Connectivity: Ethernet, WiFi, USB or SD memory data transfer
  • Number of Channels: 4
  • Resolution: 24 bits
  • Frequency: 13.1072 MHz
  • Data Rate: 1.652 kS/s to 51.2 kS/s
  • Accelerometers: (4) PCB Piezotronics, Inc. Model 393B12, 3-Axis Block
  • Magnetometer: Applied Physics Systems Model 533
  • Microphone: PCB Piezotronics, Inc. Model 130A24
ellipsometer

Ellipsometer

Determines the thickness and optical constants of thin dielectric films. Used to characterize optical coatings

  • Make: J.A. Woollam
  • Model: VASE-VB 250
  • Type: Variable Angle, Spectroscopic
  • Angle of Incidence Range: 20 degrees - 90 degrees (transmission)
  • Angular Resolution: 18 arc seconds
  • Wavelength Range: 240nm - 1100nm
  • Probe Diameter: 3 mm (100 microns with probe tubes)
fiber cleaver

Fiber Cleaver

Used for straight and angle cleaving of fiber optics.

  • Make: PK Technology
  • Model: FK12
fiber splicer

Fiber Fusion Splicer

Produces very low loss splices between optical fibers by fusing the fibers together.

  • Make: Eriksson
  • Model: FSU 975
fizeau

Fizeau Interferometer

Wavefront analyzer for characterizing the flatness of optical elements.

  • Make: Zygo
  • Model: GPI XP
  • Aperture: 4"
  • Reference Flatness: Lambda/50
  • Accessories: 4" to 33mm converter for characterizing small samples
fluorometer

Fluorometer

Used for measuring emission spectrum of a sample as a function of excitation wavelength.

  • Make: HORIBA Jobin Yvon
  • Model: Fluorolog-3 FL3-222
  • Resolution: 0.2 nm
  • Accuracy: ±0.5 nm
  • Speed: 150 nm/s
  • Range: 0-1300 nm
  • Gratings: Excitation blaze: 330 nm (200-700 nm range)
  • Emission blaze: 500 nm (300-1000 nm range)
  • Accessories: Thermo-electric cooler sample chamber attachment
ft-ir

Fourier Transform Infrared Spectrometer (FT-IR)

Measures the transmission and reflection properties of optical elements and materials in the far infrared.

  • Make: Thermo Electron
  • Model: Nicolet iS50 Advanced
  • Wavelength Range: 7800cm-1 - 200cm-1 (1.282um - 50um)
  • Resolution: 0.09 cm-1
vhx digital microscope

Digital Microscope

Used for routine light microscopy.

  • Make: Keyence
  • Model: VHX-7000
  • Features: Tiltable objective head with integrated camera and depth composition. Coaxial, ring, and mixed lighting. DIC filters available.
  • Objectives: 20X-80X, 100X-400X, 500X-2500X
leica microscope

Optical Microscope

Used for routine light microscopy.

  • Make: Leica
  • Model: M80
  • Type: Stereoscopic
  • Magnification: 7.5X to 60X Zoom
  • Camera: Leica IC90 E
power meter

Optical Power Meters

Measures optical power.

  • Make: Cascade Laser Corp FieldMaster-GS, Newport 840, FIS OV-PM Fiber Optic
  • Wavelength range: 190nm - 20 um, 200nm-1100nm, 850/1310/1550nm
  • Power range: 10nW - 5kW, 5pW - 200mW, -65 to +5 dB
optical profilometer

Optical Profilometer

Measures feature height and surface quality.

  • Make: Veeco
  • Model: Wyko NT3300
  • Type: White light vertical scan interferometer, 633nm phase shift interferometer
  • Objectives: 2.5X Mickelson, 10X Mireau, 50X Mireau
  • Multipliers: 0.5X, 0.75X, 1X, 2X
  • Stage: 8" x 8" motorized
  • Features: Automated stitching, VLSI step height standards
uv-vis-nir spectrophotometer

UV-VIS-NIR Spectrophotometer

Measures the transmission and reflection properties of optical elements and materials from the ultraviolet to near infrared wavelengths.

  • Make: Agilent
  • Model: Cary 5000
  • Type: UV-VIS-NIR Wavelength
  • Range: 175nm-3300nm (57,142cm-1 - 3030cm-1)
  • Resolution: 0.03nm
  • Specimen Chamber Capacity: 8" x 8" maximum sample size
  • Attachments: Universal Measurement Accessory (UMA, Equivalent to a Cary 7000), Specular Reflectance Accessory, Variable Angle Transmittance
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